Shown above is a semiconductor wafer necessary to churn out chips. Merck said that it had launched a green, high-performance solvent to remove photoresist patterns at wafers. Photo courtesy of Merck Korea

Tech giant comes up with high-performance solvents for photoresist removal

The world wants more electronic devices for smartphones, gaming, home entertainment, and automotive applications, which leads to a growing demand for semiconductors.

Along the same line, the chip industries require more efficient and eco-friendly components in such crucial procedures as selectively removing photoresist in wafers.

Recognizing these requirements, Merck has launched a new line of complementary green solvents for use in photolithographic processes in rolling out semiconductors, according to the tech company on July 23.

Merck said the product, dubbed AZ® 910 Remover, is a new line of formulated chemistries designed for faster dissolution of photoresist patterns in a cost-effective way.

Merck expected the portfolio will make a huge impact in the semiconductor wet chemical market with its notable environmental footprint, simple usage in various tools, and solid resist-dissolution performance.

“Merck has developed an innovative, cost-effective solution to support our customers with their advanced cleaning needs integral to realizing next-generation chips,” Merck’s semiconductor material business head Anand Nambiar said.

“AZ® 910 Remover is capable of stripping the resist using less than three times the solvent volume, saving customers money, and reducing the environmental footprint of materials entering the global waste stream.”

Unlike traditional products in the market for photoresist removal, Merck said that its new product aims to make positive impacts on both the business and the planet.

The firm pointed out that existing items cannot meet the complicated requirements of the industry for high-performance, sustainable chemistries that consume fewer solvents.

"The unrivaled dissolving performance is a major advantage for customers looking to reduce product costs and improve production throughput," Nambiar said.

"The product's purely green chemistry dramatically improves the environmental footprint of each production facility, allowing customers to simplify their wet chemical processes.
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